NTEGRA AURA
AFM for studies in the conditions of controlled environment, low vacuum, external magnetic fields.
NTEGRA Aura is a Scanning Probe Microscope for studies in the conditions of controlled environment and low vacuum.
The Q-factor of the cantilever in vacuum increases, thus gaining the sensitivity, reliability and accuracy of “probe-sample” light forces measurements. At that, the change from atmosphere pressure to 10-3 Torr vacuum provides the tenfold gain of Q-factor. By further vacuum pumping, Q-factor reaches its plateau and changes insignificantly. Thus, NTEGRA Aura presents the optimal “price/quality” ratio: comparing to the high-vacuum devices it needs much less time – only one minute – to get the vacuum that is needed for the tenfold Q-factor increase. At the same time the system is compact and easy to operate and maintain. As the NTEGRA platform product, NTEGRA Aura has built-in closed loop control for all the axes, optical system with 1 µm resolution and ability to work with more than 40 different AFM methods.
Due to the open architecture, the functionality of NTEGRA Aura can be widen essentially: specialized magnetic measurements with external magnetic field (horizontal, up to +/-0.3 T; vertical, up to +/-0.01 T), high-temperature experiments (heating up to 300 °С with temperature maintaining precision of 0.05 °С), etc.
APPLICATIONS
NTEGRA Aura allows to carry out the research of surface characteristics with nanometric resolution and near-surface physical fields of various objects that can be placed into vacuum.
SPECIFICATIONS
Measuring modes and techniques
AFM (contact + intermittent contact)/ HybriDTM mode/ Lateral Force Microscopy / Force Modulation Microscopy / Magnetic Force Microscopy/ Electrostatic Force Microscopy / Scanning Capacitance Force Microscopy/ Kelvin Probe Force Microscopy / Piezoresponce Force Microscopy/ Spreading-Resistance Imaging / STM/ Nanosclerometry/ Lithography: AFM (Force + Current), STM
TECHNICAL DATA
| Scan type | Scanning by sample | Scanning by probe* | |
| Sample size | Up to 40 mm in diameter, up to 15 mm in height |
Up to 100 mm in diameter, up to 15 mm in height |
|
| Sample weight | Up to 100 g | Up to 300 g | |
| XY sample positiniong | 5×5 mm | 5×5 mm | |
| Positioning resolution | readable resolution – 5 um sensitivity – 2 um |
readable resolution – 5 um sensitivity – 2 um |
|
| Scan range | 100x100x10 um 3x3x2,6 um |
100x100x10 um 50x50x5 um |
|
| Scan range | Up to 150x150x15 um**(DualScanTM mode) | Up to 150x150x15 um**(DualScanTM mode) | |
| Non linearity, XY (with closed loop sensors) |
≤ 0.1% | ≤ 0.15% | |
| Noise level, Z (RMS in bandwidth 1000 Hz) |
With sensors | 0.04 nm (typically), ≤0.06 nm |
0.06 nm (typically), ≤0.07 nm |
| Noise level, Z (RMS in bandwidth 1000 Hz) |
Without sensors | 0.03 nm | 0.05 nm |
| Noise level, XY*** (RMS in bandwidth 200 Hz) |
With sensors | 0.2 nm (typically), ≤0.3 nm (XY 100 um) |
0.1 nm (typically), ≤0.2 nm |
| Noise level, XY*** (RMS in bandwidth 200 Hz) |
Without sensors | 0.02 nm (XY 100 um), 0.001 nm (XY 3 um) |
0.01 nm |
| Optical viewing system | Optical resolution | 1 um | 3 um |
| Optical viewing system | Field of view | 4.5-0.4 mm | 2.0-0.4 mm |
| Optical viewing system | Continuous zoom | available | available |
| Temperature control | Range | From RT to +150 °C | From RT to +150 °C |
| Temperature control | Stability | ±0.005 °C (typically), ≤±0.01 °C | ±0.005 °C (typically), ≤±0.01 °C |
| Vacuum system | Pressure | 10-2 Torr | 10-2 Torr |
| Vibration isolation | Active | 0.7-1000 Hz | 0.7-1000 Hz |
| Vibration isolation | Passive | above 1 kHz | above 1 kHz |
* Scanning head can be configured to serve as a stand-alone device for specimens of unlimited sizes.
** Optionally can be expanded to 200x200x20 um.
*** Built-in capacitive sensors have extremely low noise and any area down to 50×50 nm can be scanned with closed-loop control.