Interdisciplinary research at the nanometer scale: AFM + Confocal Raman + SNOM + TERS

Integration of SPM and confocal microscopy/Raman scattering spectroscopy. Owing to Tip Enhances Raman Scattering it allows carrying out spectroscopy/microscopy with up to 10 nm resolution.

NTEGRA Spectra – AFM / CONFOCAL RAMAN & FLUORESCENCE / SNOM / TERS (Nano-Raman)Integration: The key to the new sciences

Change happens at interfaces and today’s most exciting changes in microscopy are happening where multiple technologies are interfaced together. NTEGRA Spectra is a prime example, uniting the full power of atomic force microscopy (AFM), confocal Raman and fluorescence microscopy and scanning near-field optical microscopy (SNOM) in one platform.

Different configuration of AFM with confocal Raman/Fluorescence microscope


A unique configuration for simultaneous AFM – Raman – TERS* and SNOM imaging of opaque samples

*TERS: Tip Enhanced Raman Scattering, Tip Enhanced Fluorescence etc.


Optimized for simultaneous AFM – Raman – TERS* and SNOM imaging of samples on transparent substrates (living cells, nanoparticles etc.)

Side illumination option

Used to facilitate TERS* measurements on opaque samples

Fiber Scanning Near-field Optical Microscopy (SNOM)

SNOM techniques based on on quartz fiber.

Cantilever Scanning Near-field Optical Microscopy (SNOM)

SNOM techniques based on cantilevers with aperture.

  • Atomic Force Microscopy ( 30 modes )
  • Confocal Raman / Fluorescence / Rayleigh Microscopy
  • Scanning Near-Field Optical Microscopy ( SNOM / NSOM )
  • Optimized for Tip Enhanced Raman and Fluorescence (TERS, TEFS, TERFS) and scattering SNOM (s-SNOM)




  • AFM (mechanical, electrical, magnetic properties, nanomanipulation etc.)
  • White Light Microscopy and Confocal Laser (Rayleigh) Imaging
  • Confocal Raman Imaging and Spectroscopy
  • Confocal Fluorescence Imaging and Spectroscopy
  • Scanning Near-Field Optical Microscopy (SNOM)
  • Tip Enhanced Raman and Fluorescence Microscopy (TERS, TEFS, TERFS)

Controlled environment:

  • Temperature
  • Humidity
  • Gases
  • Liquid
  • Electrochemical environment
  • External magnetic field


– Confocal Raman/Fluorescence microscopy
– AFM/STM: Integration with spectroscopy
– Software
– Spectroscopy
– Scanning Near Field Optical Microscopy (SNOM)
– Optimized for Tip Enhanced Raman Scattering (TERS) and other tip-related optical techniques
Confocal Raman/Fluorescence microscopy
– Confocal Raman/Fluorescence/Rayleigh imaging runs simultaneously with AFM (during one sample scan)
– Diffraction limited spatial resolution: 200 nm in XY, 500 nm in Z (with immersion objective)
– True confocality; push button from software to control the motorized confocal pinhole for optimal signal and confocality
– Motorized variable beam expander/collimator: adjusts diameter and collimation of the laser beam individually for each laser and each objective used
– Full 3D (XYZ) confocal imaging with powerful image analysis
– Hyperspectral imaging (recording complete Raman spectrum in every point of 1D, 2D or 3D confocal scan) with further software analysis
– Optical lithography (vector, raster)
AFM/STM: Integration with spectroscopy
– Upright and Inverted optical AFM configurations (optimized for opaque and transparent samples correspondingly);
– side illumination option
– Highest possible resolution (numerical aperture) optics is used simultaneously with AFM: 0.7 NA for Upright, 1.3–1.4 NA for Inverted
– AFM/STM and confocal Raman/Fluorescence images are obtained simultaneously (during one scan)
– All standard SPM imaging modes are supported (30 modes) — combined with confocal Raman/Fluorescence
– Low noise AFM/STM (atomic resolution)
– Vibrations and thermal drifts originating from optical microscope body are minimized due to special design of optical AFM heads
– Focus track feature: sample always stays in focus due to AFM Z-feedback; high quality confocal images of very rough or inclined samples can be obtained
– Seamless integration of AFM and Raman; all AFM/ Raman/SNOM experiment and further data analysis is performed in one and the same software
– Powerful analysis of 1D, 2D and 3D hyperspectral images
– Powerful export to other software (Excel, MatLab, Cytospec etc.)
– Extremely high efficiency 520 mm length spectrometer with 4 motorized gratings
– Visible, UV and IR spectral ranges available
– Echelle grating with ultrahigh dispersion; spectral resolution: 0.007 nm (< 0.1 1/cm)**
– Up to 3 different detectors can be installed
– TE cooled (down to -100 ºC) CCD camera. EMCCD camera is optional — for ultrafast imaging
– Photon multiplier (PMT) or avalanche photodiode in photon counting mode
– Photon multiplier for fast confocal laser (Rayleigh) imaging
– Flexible motorized polarization optics in excitation and detection channels, cross-polarized Raman measurements
– Fully automated switch between different lasers — with a few mouse clicks
Scanning Near Field Optical Microscopy (SNOM)*
– Two major SNOM techniques supported: (i) based on quartz fiber probes, (ii) based on silicon cantilever probes
– All modes supported: Transmission, Collection, Reflection
– All SNOM signals detected: laser intensity, fluorescence intensity, spectroscopy
– SNOM lithography (vector, raster)
Optimized for Tip Enhanced Raman Scattering (TERS) and other tip-related optical techniques (S-SNOM, SNIM, TEFS, STM-LE etc.)
– All existing TERS geometries are available: illumination / collection from bottom, from top or from side
– Different SPM techniques and TERS probes can be used: STM, AFM cantilever, quartz tuning fork in tapping and shear force modes
– Dual scan (for Hot Point Mapping in TERS): scan by sample AND scan by tip / by laser spot
– Motorized polarization optics to produce optimal polarization for TERS
AFM-Raman measurements can run in air, in controlled atmosphere or in liquid — all with variable temperature (for Inverted configuration)
– Some features listed are optional — not included into basic system configuration

* NT-MDT AFM can be integrated with Renishaw inVia or with NT-MDT spectrometer. Specifications are given for the latter. Renishaw specifications can be found at www.renishaw.com/AFM-Raman
** Exact value of spectral resolution highly depends on how “resolution” is defined