TGG1
€220,00
Calibration grating TGG1 is intended for
- AFM calibration in X or Y axis;
- detection of lateral and vertical scanner nonlinearity;
- detection of angular distortion;
- tip characterization.
General Features
| Structure | Si |
| Pattern type | 1- D array of triangular steps (in X or Y direction) having precise linear and angular sizes |
| Period | 3±0,05 µm |
| Chip size | 5x5x0,5 mm |
| Effective area | central square 3×3 mm |
| Edge angle | 70 degrees |
| Edge radius | ≤10nm |
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