TGS1F
€250,00
Grating set TGS1 consists of 4 calibration gratings: TGZ1, TGZ2, TGZ3, TGZ4 and intended for Z and X (or Y) calibration and nonlinearity measurements.
- TGZ1 - for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
- TGZ2 - for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
- TGZ3 - for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements.
- TGZ4 - for Z-axis calibration (step height 1517 ± 20 nm) and nonlinearity measurements.
General Features
| Structure | step – SiO2, bottom – Si |
| Pattern type | 2 – Dimensional |
| Period | 3±0,05 µm |
| Chip size | 5x5x0,5 mm |
| Effective area | central square 3×3 mm |
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