Grating set TGS2 consists of 6 calibration gratings: TGZ1, TGZ2, TGZ3, TGT1, TGG1, TGX1. Grating set TGS2 can be used for:
  • AFM calibration in X, Y and Z directions;
  • lateral and vertical calibration;
  • detection of lateral non-linearity;
  • detection of hysteresis, creep, and cross-coupling effects;
  • detection of angular distortion;
  • for 3-D visualization of the scanning tip;
  • determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
  • TGZ1 – for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
  • TGZ2 – for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
  • TGZ3 – for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements
  • TGX1 – for lateral scanner calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip sharpness.
  • TGG1 – for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, tip sharpness characterization.
  • TGT1 – for tip shape and sharpness estimation, for image deconvolution and contamination control


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