Grating set TGSFull consists of 8 calibration gratings: TGZ1, TGZ2, TGZ3, TGT1, TGQ1, TGG1, TGX1, TDG01. Grating set TGSFull can be used for:
  • SPM simultaneuos calibration in X, Y and Z directions;
  • submicron SPM calibration in X or Y direction;
  • lateral and vertical calibration;
  • detection of lateral non-linearity;
  • detection of hysteresis, creep, and cross-coupling effects;
  • detection of angular distortion;
  • for 3-D visualization of the scanning tip;
  • determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
  • TGZ1 – for Z-axis calibration (step height 20,0±1.5 nm) and nonlinearity measurements
  • TGZ2 – for Z-axis calibration (step height 110,0±2 nm) and nonlinearity measurements
  • TGZ3 – for Z-axis calibration (step height 520 ± 3 nm) and nonlinearity measurements
  • TGX1 – for lateral scanner calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip sharpness.
  • TGG1 – for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, tip sharpness characterization.
  • TGT1 – for tip shape and sharpness estimation, for image deconvolution and contamination control.
  • TGQ1 – for simultenious calibration in X,Y,Z directions. Step height 20±1.5nm.
  • TDG01 – for AFM submicron calibration in the X or Y direction. Period is 278nm.


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