TGT1
€385,00
Calibration grating TGT1 is intended for
- tip shape and sharpness estimation and further using in deconvolution program;
- tip degradation and contamination control.
General Features
| Structure | the grating is formed on Si wafer top surface |
| Pattern type | 3-D array of sharp tips |
| Period | 3±0,05 µm |
| Height | 0.3 – 0.5µm |
| Chip size | 5x5x0,5 mm |
| Effective area | central square 2×2 mm |
| Tip angle | 50±10 degrees (on the very tip end) |
| Tip curvature radius | ≤10nm |
| Diagonal period | 2,12 µm |
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