Calibration grating TGQ1 is intended for
  • simultaneous calibration in X, Y and Z directions;
  • scanner lateral calibration;
  • detection of lateral non-linearity, hysteresis, creep and cross-coupling effects.
Step height is the average meaning based on the measurements of 5 gratings with the same height (from the batch of 300 gratings) by AFM calibrated wih help of PTB certified grating TGZ1. Basic step height can vary from the specified one within ±15% depending on the batch (for example step height can be 23±1.5 nm).

General Features

Structure step – SiO2, bottom – Si
Pattern type 3-Dimensional array of rectangulars
Period 3±0,05 µm
Height 20±1.5 nm*
Rectangles side size 1,5±0,35 µm
Chip size 5x5x0,5 mm
Effective area central square 3×3 mm


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